2KW 3.5KW Ultrapure PFA Inline Chemical Heater are ideal for
heating deionized water, acids, and less aggressive process
chemistries use in high-purity processes of semiconductor, solar,
MEMS manufacturing, and other industries using high-purity fluids.
These heaters are designed for recirculation and point-of-use fluid
heating applications.
Their small footprints allow them to easily integrate into current
systems.
Available in 3-18 kW and various voltages
Summary of parameters:
| Ultrapure water heater | value |
| voltage | 110~415V 1p/3P |
| Power | 6~18KW |
| Maximum pressure | 0.4MPa |
| Minimum pressure | 0.1MPa |
| Maximum flow | 30L/min |
| Maximum operating temperature | 120℃ |
Notes
1) This product must be installed vertically
2) The use process must be grounded
3) Water must be passed before heating
4) Product size and technical parameters can be customized
according to customer needs
Applications
Semiconductor Wet Processes
Sterilization/Cleaning
Solar/Photovoltaic Wafer Cleaning
Industries
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Others Applications
Ultra-High-Purity Heating
Designed with Ultra-High-Purity processes in mind, Surplus delivers
clean-room assembled, reliable heating and power solutions to fit
specific needs.
Products For Ultra-High-Purity Heating |
Inline Heater 
| PFA Inline Heater
| Inline Chemical Heater 
|
Flammable Solvent Heating
Products designed to safely heat IPA and low flash-point solvents,
meeting the most stringent cleanliness requirements to support
next-generation semiconductor node technologies.
Products For Flammable Solvent Heating |
| PFA Inline Chemical Heater | PTFE Inline Chemical Heater
| Inline Chemical Heater
|
An inline chemical heater is a device that heats a fluid as it flows through a pipe or tube,
rather than heating a whole tank of liquid. These heaters are
designed to quickly heat the fluid at the point of use, offering
advantages like faster heating, reduced heat loss, and improved
efficiency. They are commonly used in industrial settings for
heating chemicals, solvents, and other fluids in processes like
semiconductor manufacturing, chemical processing, and fluid
handling.
Key Features and Benefits of Inline Chemical Heaters:
Fast Heat-up:
Inline heaters allow for rapid heating of continuous fluid flows,
eliminating the need to wait for an entire tank to reach the
desired temperature before using the heated fluid.
Point-of-Use Heating:
The fluid is heated directly where it's needed, minimizing heat
loss and energy consumption.
Efficient Energy Usage:
Focusing heat on the flowing fluid reduces energy waste compared to
heating a large volume.
Versatile Applications:
Inline heaters are available in various designs and materials to
handle a wide range of chemicals, solvents, and temperatures.
Material Compatibility:
Many inline heaters are made with materials like stainless steel,
fluoropolymers (PFA/PTFE), quartz, and titanium to resist corrosion
and chemical reactions.
Safety Features:
Some inline heaters incorporate features like gas purging to remove
chemical permeation, temperature sensors, and self-limiting
technology for safe operation in various conditions.
Customization:
Options for single-pass or recirculating applications, different
power outputs, and various fluid connections enable customization
for specific process needs.
Low Wattage Options:
Some inline heaters are designed for low wattage, making them
suitable for sensitive chemistries and applications where
maintaining precise temperature control is crucial.
Applications of Inline Chemical Heaters:
Semiconductor Manufacturing:
Heating chemicals for cleaning wafers, stripping resist, and
various process steps.
Chemical Processing:
Heating and maintaining temperatures for chemical reactions,
mixing, and other process steps.
Solvent Handling:
Heating solvents for use in cleaning, extraction, and other
applications.
Ultra-High Purity (UHP) Applications:
Inline heaters designed for ultra-high purity materials are
essential for processes like deionized water heating,
pharmaceutical manufacturing, and advanced materials science.
The Parts Of An Inline Heater
Inline heaters are made up of a number of different parts:
The heating element and its sheath and thermal insulation.
The pump unit that pushes the fluid to be heated through the
system.
The fluid itself, which passes through a loop around the heating
element, getting hotter with each pass.
The outlet nozzle where the heated fluid is pushed out of the
system once it reaches the correct heat.
Thermocouple sensors that determine when the liquid has reached the
desired temperature.
A control system that varies in its complexities – some allow the
unit to be turned on and off, but have a set temperature, while
others are more flexible and allow the user to change the
temperature.
There are some optional components that can be added to an inline
heater. These include stronger cases that are moisture resistant or
are strong enough to contain an explosion. Additional flange types
and mounting equipment are also available.
